Piezoelectric actuator and scanning probe microscope using the same
View Patent ↗A leaf spring 4 constituting an elastic member one end of which is fixed to a foundation 6 , and other end of which is brought into contact with a laminating type piezoelectric element 2 or a driven member 5 is constituted such that a thickness is thinned from a side of the foundation 6 to a side of the laminating type piezoelectric element 2 to make a moment of inertia smaller on a side of a portion of other end held by the laminating type piezoelectric element 2 than a portion on one end side fixed to the foundation 6 . Further, a strain gage sensor 8 is attached to a side face 4 a of the leaf spring 4 constituting one face of one end of the leaf spring 4 proximate to the laminating type piezoelectric element 2 orthogonal to a direction of elongating and contracting the laminating type piezoelectric element 2 constituting a side of the driven member 5.
1. A piezoelectric actuator characterized in comprising:
a piezoelectric element displaced by applying a voltage;
a foundation for fixing one end of the piezoelectric element;
a driven member fixed to other end of the piezoelectric element; and
an elastic member one end of which is directly or indirectly fixed to the foundation, other end of which is brought into contact with the piezoelectric element or the driven member, and which prepressurizes the piezoelectric element or the driven member in a compressing direction;
wherein the elastic member is constituted by a shape in which a moment of inertia of a portion of the other end brought into contact with the piezoelectric element or the driven member is smaller than a moment of inertia of a portion on one end side thereof fixed to the foundation.
2. The piezoelectric actuator according to claim 1 , characterized in that the elastic member is constituted by a structure in which the moment of inertia is reduced continuously or in steps from the one end side fixed to the foundation to the other end brought into contact with the piezoelectric element or the driven member.
3. The piezoelectric actuator according to claim 1 , characterized in that a face of the one end of the elastic member brought into contact with the piezoelectric element or the driven member and having the small moment of inertia is attached with a strain gage sensor to be spaced apart from the piezoelectric element or the driven member by an interval of not being brought into contact therewith.
4. The piezoelectric actuator according to claim 1 , characterized in that the piezoelectric element is a laminating type piezoelectric element laminated with a plurality of piezoelectric elements.
5. The piezoelectric actuator according to claim 1 , characterized in that the elastic member is constituted by a structure in which a sectional area thereof is reduced continuously or in steps from one end side directly or indirectly fixed to the foundation to other end brought into contact with the piezoelectric element or the driven member.
6. The piezoelectric actuator according to claim 1 , characterized in that the elastic member is a leaf spring a thickness of which is thinned continuously or in steps from one end side indirectly fixed to the foundation to other end brought into contact with the piezoelectric element or the driven member.
7. The piezoelectric actuator according to claim 1 , characterized in that the elastic member is a belleville spring a thickness of which is thinned continuously or in steps from an outer periphery thereof to a center thereof centering on a direction of displacing the piezoelectric element from one end side indirectly fixed to the foundation to other end brought into contact with the piezoelectric element or the driven member.
8. The piezoelectric actuator according to claim 1 , characterized in that the elastic member is a coil spring comprising a wire a boldness of which becomes slender continuously or in steps from one end side directly fixed to the foundation to other end brought into contact with the piezoelectric element or the driven member.
9. A scanning probe microscope characterized in comprising:
a cantilever having a probe at a front end thereof;
a stage mounted with a sample arranged opposedly to the probe;
moving means for moving the probe and the sample relative to each other in a direction in parallel with a surface of the sample; and
measuring means for measuring a displacement of the cantilever in a vibrating state; and
wherein the piezoelectric actuator according to claim 1 is used for the moving means.
10. The scanning probe microscope according to claim 9 , characterized in that the stage is arranged above the driven member.