X-ray analyzer and X-ray analysis method
View Patent ↗An X-ray analyzer includes a transmission X-ray inspecting portion having a first X-ray source and a transmission X-ray detector for detecting a transmission X-ray that passed through a sample from the first X-ray source, and a fluorescent X-ray inspecting portion having a second X-ray source and a fluorescent X-ray detector for detecting a fluorescent X-ray output from the sample when the sample is irradiated with an X-ray from the second X-ray source. A movement mechanism moves a sample stage that supports the sample. A foreign matter position calculating unit calculates a position of foreign matter in the sample, and a movement mechanism control unit controls the movement mechanism so that the position of the foreign matter calculated by the foreign matter position calculating unit coincides with an optical axis of the second X-ray source.
1. An X-ray analyzer, comprising:
a transmission X-ray inspecting portion comprising:
a first X-ray source; and
a transmission X-ray detector for detecting a transmission X-ray that passed through a sample from the first X-ray source;
a fluorescent X-ray inspecting portion comprising:
a second X-ray source; and
a fluorescent X-ray detector for detecting a fluorescent X-ray output from the sample when the sample is irradiated with an X-ray from the second X-ray source;
a sample stage for holding the sample;
a movement mechanism for moving the sample stage relatively between an irradiation position of the first X-ray source and an irradiation position of the second X-ray source;
foreign matter position calculating means for calculating a position of a foreign matter detected in the sample by the transmission X-ray detector, the foreign matter position calculating means being configured to:
calculate a distance t 2 on the transmission X-ray detector along a direction perpendicular to an optical axis of the first X-ray source from the optical axis of the first X-ray source to the position of the foreign matter, a distance h 1 parallel to the optical axis of the first X-ray source from the first X-ray source to the position of the foreign matter, and a distance h 2 parallel to the optical axis of the first X-ray source from the first X-ray source to a position of the transmission X-ray detector; and
calculate a distance t 1 along a direction perpendicular to the optical axis of the first X-ray source from the optical axis of the first X-ray source to the position of the foreign matter based on an equation t 1 =(h 1 /h 2 )×t 2 ; and
movement mechanism control means for controlling the movement mechanism so that the position of the foreign matter calculated by the foreign matter position calculating means coincides with an optical axis of the second X-ray source.
2. An X-ray analyzer according to claim 1 ,
wherein the optical axis of the first X-ray source and the optical axis of the second X-ray source are parallel to each other, and
wherein a movement direction of the sample stage is perpendicular to the optical axis of the first X-ray source and the optical axis of the second X-ray source.
3. An X-ray analysis method, comprising;
detecting, using a transmission X-ray detector, a transmission X-ray that passed through a sample from a first X-ray source;
detecting, at a position different from an irradiation position of the first X-ray source, a fluorescent X-ray output from the sample when the sample is irradiated with an X-ray from a second X-ray source;
calculating a position of a foreign matter detected in the sample in the detecting a transmission X-ray by calculating a distance t 2 on the transmission X-ray detector along a direction perpendicular to an optical axis of the first X-ray source from the optical axis of the first X-ray source to the position of the foreign matter, a distance hi parallel to the optical axis of the first X-ray source from the first X-ray source to the position of the foreign matter, and a distance h 2 parallel to the optical axis of the first X-ray source from the first X-ray source to a position of the transmission X-ray detector, and calculating a distance ti along a direction perpendicular to the optical axis of the first X-ray source from the optical axis of the first X-ray source to the position of the foreign matter based on an equation t 1 =(h 1 /h 2 )×t 2 ; and
moving the sample so that the position of the foreign matter coincides with an optical axis of the second X-ray source in the detecting a fluorescent X-ray.