Granted Patent
Utility
US 6,383,823 · App. 09/328,139
Probe for scanning probe microscope (SPM) and SPM device
Inventors:
Hiroshi Takahashi, Nobuhiro Shimizu, Yoshiharu Shirakawabe
Patented Case
View Patent ↗
Granted: May 7, 2002
Filed: Jun 8, 1999
Inventors
Hiroshi Takahashi
Nobuhiro Shimizu
Yoshiharu Shirakawabe
Assignee (at issue)
SEIKO INSTRUMENTS INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.