Micro-sample pick-up apparatus and micro-sample pick-up method
View Patent ↗A micro-sample pick-up apparatus has a probe for picking up a micro sample, a probe holder for holding the probe, an XYZ driver mechanism for moving the probe holder in the three-dimensional directions of X, Y and Z, and an observation mechanism for observing the sample and the probe. A low-vibration rotary mechanism disposed in the probe holder for rotating the probe about an axis of the probe.
1. A micro-sample pick-up apparatus for picking up a micro sample cut out from a sample and provided in a microscope system, the micro-sample pick-up apparatus comprising:
a probe for picking up the sample;
a probe holder for holding the probe;
an XYZ driver mechanism for moving the probe holder in the three-dimensional directions of X, Y and Z;
an observation mechanism for observing the sample and the probe; and
a low-vibration rotary mechanism disposed in the probe holder for rotating the probe about an axis of the probe.
2. A micro-sample pick-up apparatus according to claim 1 ; wherein the observation mechanism is an optical microscope.
3. A micro-sample pick-up apparatus according to claim 1 ; wherein the observation mechanism is an electron microscope or an ion microscope.
4. A micro-sample pick-up apparatus comprising:
a probe for picking up a micro sample;
a probe holder for holding the probe so that the probe extends from a tip of the probe holder;
a driver mechanism for moving the probe holder in three-dimensional directions; and
rotary means for rotating the probe about a longitudinal axis thereof by rotating only the tip of the probe holder.
5. A micro-sample pick-up apparatus according to claim 4 ; further comprising an observation mechanism for observing the micro sample and the probe.
6. A micro-sample pick-up apparatus according to claim 5 ; wherein the observation mechanism comprises an optical microscope.
7. A micro-sample pick-up apparatus according to claim 5 ; wherein the observation mechanism comprises an electron microscope.
8. A micro-sample pick-up apparatus according to claim 5 ; wherein the observation mechanism comprises an ion microscope.
9. A micro-sample pick-up apparatus according to claim 4 ; wherein the rotary means is disposed in the probe holder.
10. A micro-sample pick-up apparatus according to claim 4 ; wherein the rotary means comprises a low-vibration rotary mechanism.
11. A micro-sample pick-up apparatus according to claim 10 ; wherein the low-vibration rotary mechanism is disposed in the probe holder.
12. A micro-sample pick-up apparatus for picking up a micro sample and correcting a rotational direction of the micro sample, the micro-sample pick-up apparatus comprising:
a probe for picking up a micro sample;
a probe holder for holding the probe so that the probe extends from a tip of the probe holder;
a driver mechanism for moving the probe holder in three-dimensional directions; and
rotary means for rotating the probe about a longitudinal axis thereof by rotating only the tip of the probe holder to thereby correct a rotational direction of the micro sample without substantially vibrating the micro sample.
13. A micro-sample pick-up apparatus according to claim 12 ; further comprising an observation mechanism for observing the micro sample and the probe.
14. A micro-sample pick-up apparatus according to claim 13 ; wherein the observation mechanism comprises an optical microscope.
15. A micro-sample pick-up apparatus according to claim 13 ; wherein the observation mechanism comprises an electron microscope.
16. A micro-sample pick-up apparatus according to claim 13 ; wherein the observation mechanism comprises an ion microscope.
17. A micro-sample pick-up apparatus according to claim 12 ; wherein the rotary means is disposed in the probe holder.
18. A micro-sample pick-up apparatus according to claim 12 ; wherein the rotary means comprises a low-vibration rotary mechanism.
19. A micro-sample pick-up apparatus according to claim 18 ; wherein the low-vibration rotary mechanism is disposed in the probe holder.