Superconducting X-ray detection apparatus and superconducting X-ray analyzer using the apparatus
View Patent ↗A superconducting X-ray detection apparatus has a refrigerator, a cooling head cooled by the refrigerator, and a stacked structure connected to an end portion of the cooling head. The stacked structure comprises a sensor holder, a low-temperature first-stage amplifier connected to the sensor holder, and a superconducting X-ray detector mounted on the low-temperature first-stage amplifier.
1. A superconducting X-ray detection apparatus comprising: a refrigerator; a cooling head cooled by the refrigerator and a stacked structure connected to an end portion of the cooling head, the stacked structure comprising a sensor holder, a low-temperature first-stage amplifier connected to the sensor holder, and a superconducting X-ray detector mounted on the low-temperature first-stage amplifier.
2. A superconducting X-ray detection apparatus according to claim 1 ; further comprising a superconductive member disposed between the sensor holder and the low-temperature first-stage amplifier.
3. A superconducting X-ray detection apparatus according to claim 1 ; further comprising a superconductive member disposed between the superconducting X-ray detector and the low-temperature first-stage amplifier.
4. A superconducting X-ray detection apparatus according to claim 2 ; wherein the superconductive member comprises a superconductive foil.
5. A superconducting X-ray apparatus according to claim 3 ; wherein the superconductive member comprises a superconductive foil.
6. A superconducting X-ray analyzer comprising: an electron microscopy system having an electron beam source for irradiating a sample with an electron beam; and a superconducting X-ray detection apparatus according to claim 1 for detecting X-rays generated from the sample irradiated with the electron beam.
7. A superconducting X-ray analyzer according to claim 6 ; further comprising a superconductive member disposed between the sensor holder and the low-temperature first-stage amplifier of the detection apparatus.
8. A superconductor X-ray analyzer according to claim 6 ; further comprising a superconductive member disposed between the superconducting X-ray detector and the low-temperature first-stage amplifier.
9. A superconducting X-ray analyzer according to claim 7 ; wherein the superconductive member comprises a superconductive foil.
10. A superconducting X-ray analyzer according to claim 8 ; wherein the superconductive member comprises a superconductive foil.
11. A superconducting X-ray detection apparatus comprising: a cooling head; and a stacked structure connected to an end portion of the cooling head, the stacked structure comprising a superconducting X-ray detector, a low-temperature first-stage amplifier, and a superconductive member disposed between the superconducting X-ray detector and the low-temperature first-stage amplifier.
12. A superconducting X-ray detection apparatus according to claim 11 ; wherein the superconductive member comprises a superconductive foil.
13. A superconducting X-ray detection apparatus according to claim 11 ; further comprising a sensor holder disposed between the cooling head and the low-temperature first-stage amplifier.
14. A superconducting X-ray analyzer comprising: an electron microscopy system having an electron beam source for irradiating a sample with an electron beam; and a superconducting X-ray detection apparatus according to claim 11 for detecting X-rays generated from the sample irradiated with the electron beam.