Electrical property evaluation apparatus

1. An electrical property evaluation apparatus for measuring an electrical property of an object, comprising:

a magnetic field generating mechanism that generates a magnetic field in a target area on an object to be measured, the magnetic field generating mechanism including a pair of magnetic field coils, each magnetic field coil having a magnetic role member, and the magnetic field coils being located opposite to each other;

a magnetic sensor for measuring the magnetic field near the target area;

a cantilever having a conducting probe, the cantilever being supported so that the probe can be brought into contact with the target area, and the cantilever and the magnetic sensor being located in a center location between the pair of magnetic pole members;

a moving mechanism that moves the cantilever relative to the object to carry our scanning while keeping the probe in contact with the object;

a bending measurement mechanism that measures an amount of bending of the cantilever when the probe is brought into contact with the object;

a control section that controls the moving mechanism so as to maintain the bending amount of the cantilever constant;

a voltage source for applying a voltage to the probe; and

an electrical property measuring section that measures a current or an electrical resistance between the probe and the object in contact with each other.

2. An electrical property evaluation apparatus according to claim 1 ; wherein the pair of magnetic pole members are shaped into a rod or strip form and disposed at an inclination to a surface of the target area with tips thereof facing toward the target area.

3. An electrical property evaluation apparatus for measuring an electrical property of an object, comprising:

a magnetic field generating mechanism that generates a magnetic field in a target area of an object to be measured, the magnetic field generating mechanism including a pair of spaced-apart magnetic field coils each having a magnetic pole member;

a magnetic sensor for measuring the magnetic field near the target area;

a cantilever having a conducting probe and being supported so that the probe can be brought into contact with the target area, the cantilever and the magnetic sensor being located in a center region between the pair of magnetic pole members;

a voltage source for applying a voltage to the probe; and

an electrical property measuring section that measures a current or an electrical resistance between the probe and the object in contact with each other.

4. An electrical property evaluation apparatus according to claim 3 ; wherein the pair of magnetic pole members have an elongate shape and are disposed at an inclination relative to a surface of the target area such that tips of the magnetic pole members face toward the target area.

5. An electrical property evaluation apparatus according to claim 4 ; wherein the cantilever is bendable; and further including a moving mechanism that scans the cantilever relative to the object while keeping the probe in contact with the object; a bending measurement mechanism that measures an amount of bending of the cantilever when the probe is brought into contact with the object; and a control section that controls the moving mechanism so as to maintain the bending amount of the cantilever constant.

6. An electrical property evaluation apparatus according to claim 3 ; wherein the cantilever is bendable; and further including a moving mechanism that scans the cantilever relative to the object while keeping the probe in contact with the object; a bending measurement mechanism that measures an amount of bending of the cantilever when the probe is brought into contact with the object; and a control section that controls the moving mechanism so as to maintain the bending amount of the cantilever constant.