IP Library Patent Application 10029515
Patent Application Utility
App. No. 10/029,515 · Confirmation No. 5902

CHEMICAL MECHANICAL POLISHING APPARATUS AND METHODS WITH POROUS VACUUM CHUCK AND PERFORATED CARRIER FILM

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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Code Description Pages PDF
2004-05-14 IFEE Issue Fee Payment (PTO-85B) 1 View
2001-12-21 TRNA Transmittal of New Application 3 View
2001-12-21 SPEC Specification 27 View
2001-12-21 CLM Claims 7 View
2001-12-21 ABST Abstract 1 View
2001-12-21 DRW Drawings-only black and white line drawings 11 View
2001-12-21 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
10/029,515
Filed
2001-12-21
Granted
2004-06-22
Pub. No.
US20030119431A1
Art Unit
3723
PTA
0 days