Patent Application
Utility
App. No. 10/029,515
· Confirmation No. 5902
CHEMICAL MECHANICAL POLISHING APPARATUS AND METHODS WITH POROUS VACUUM CHUCK AND PERFORATED CARRIER FILM
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-05-14 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-12-21 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-12-21 | SPEC |
Specification | 27 | View | |
| 2001-12-21 | CLM |
Claims | 7 | View | |
| 2001-12-21 | ABST |
Abstract | 1 | View | |
| 2001-12-21 | DRW |
Drawings-only black and white line drawings | 11 | View | |
| 2001-12-21 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
451/289
B24B37/27
B24B37/30
Prosecution
- Examiner
- ROSE, ROBERT A
- Art Unit
- 3723
- Customer No.
- 25920
- Docket No.
- LAM2P307
- Confirmation No.
- 5902
Publication
- Pub. No.
- US20030119431A1
- Pub. Date
- 2003-06-26
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2008-05-18
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-12-21
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Quick Facts
- App. No.
- 10/029,515
- Filed
- 2001-12-21
- Granted
- 2004-06-22
- Pub. No.
- US20030119431A1
- Examiner
- ROSE, ROBERT A
- Art Unit
- 3723
- PTA
- 0 days
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