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App. No. 10/033,615 · Confirmation No. 9294

INTEGRATED PLANARIZATION AND CLEAN WAFER PROCESSING SYSTEM

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗
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 Code Description Pages PDF
2003-11-24 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-04-11 TRNA Transmittal of New Application 3 View
2002-04-11 DRW Drawings-only black and white line drawings 11 View
2001-12-26 TRNA Transmittal of New Application 3 View
2001-12-26 SPEC Specification 20 View
2001-12-26 CLM Claims 7 View
2001-12-26 ABST Abstract 1 View
2001-12-26 DRW Drawings-only black and white line drawings 12 View
2001-12-26 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
10/033,615
Filed
2001-12-26
Granted
2004-01-13
Art Unit
3723
PTA
-7 days