IP Library › Granted Patent US 6,689,536
Granted Patent Utility
US 6,689,536 · Confirmation No. 9663

PATTERN FORMATION MATERIAL AND PATTERN FORMATION METHOD

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Quick Facts
Patent No.
US 6,689,536
App. No.
10/033,899
Filed
2002-01-03
Granted
2004-02-10
Pub. No.
US20020197557A1
Art Unit
1752
PTA
0 days