IP Library › Granted Patent US 6,743,646
Granted Patent Utility
US 6,743,646 · Confirmation No. 2550

BALANCING PLANARIZATION OF LAYERS AND THE EFFECT OF UNDERLYING STRUCTURE ON THE METROLOGY SIGNAL

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 Code Description Pages PDF
2003-12-24 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2003-12-08 IFEE Issue Fee Payment (PTO-85B) 2 View
2003-11-04 A.NA Amendment after Notice of Allowance (Rule 312) 3 View
2003-11-04 CLM Claims 7 View
2003-11-04 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2001-10-22 TRNA Transmittal of New Application 2 View
2001-10-22 ADS Application Data Sheet 2 View
2001-10-22 SPEC Specification 16 View
2001-10-22 CLM Claims 9 View
2001-10-22 ABST Abstract 1 View
2001-10-22 DRW Drawings-only black and white line drawings 10 View
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Quick Facts
Patent No.
US 6,743,646
App. No.
10/035,925
Filed
2001-10-22
Granted
2004-06-01
Pub. No.
US20030194820A1
Art Unit
2829
PTA
-51 days