IP Library › Patent Application 10037161
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App. No. 10/037,161 · Confirmation No. 4841

PHOTORESIST COMPOSITION FOR DEEP UV RADIATION CONTAINING AN ADDITIVE

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2004-03-03 IFEE Issue Fee Payment (PTO-85B) 1 View
2001-11-07 TRNA Transmittal of New Application 11 View
2001-11-07 SPEC Specification 14 View
2001-11-07 CLM Claims 2 View
2001-11-07 ABST Abstract 1 View
2001-11-07 OATH Oath or Declaration filed 4 View
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Quick Facts
App. No.
10/037,161
Filed
2001-11-07
Granted
2004-04-20
Pub. No.
US20030087180A1
Art Unit
1752
PTA
0 days