IP Library Granted Patent US 6,716,084
Granted Patent Utility
US 6,716,084 · Confirmation No. 6015

CARRIER HEAD FOR HOLDING A WAFER AND ALLOWING PROCESSING ON A FRONT FACE THEREOF TO OCCUR

⬇ PDF
Code Description Pages PDF
2008-12-15 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2008-12-01 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2005-12-08 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2005-01-19 COCOUT Certificate of Correction - Post Issue Communication 2 View
2004-02-20 LET. Miscellaneous Incoming Letter 1 View
2004-02-20 DRW Drawings-only black and white line drawings 5 View
2004-02-13 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-02-13 LET. Miscellaneous Incoming Letter 1 View
2004-02-13 DRW Drawings-only black and white line drawings 5 View
2002-04-29 TRNA Transmittal of New Application 3 View
2002-04-29 DRW Drawings-only black and white line drawings 5 View
2002-04-29 OATH Oath or Declaration filed 3 View
2002-01-08 TRNA Transmittal of New Application 1 View
2002-01-08 SPEC Specification 12 View
2002-01-08 CLM Claims 3 View
2002-01-08 ABST Abstract 1 View
2002-01-08 DRW Drawings-only black and white line drawings 6 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,716,084
App. No.
10/043,656
Filed
2002-01-08
Granted
2004-04-06
Pub. No.
US20020151257A1
Art Unit
3723
PTA
-96 days