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App. No. 10/047,343 · Confirmation No. 5092

HOLLOW CYLINDRICAL CATHODE SPUTTERING TARGET AND PROCESS FOR PRODUCING IT

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2003-09-22 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-01-15 TRNA Transmittal of New Application 3 View
2002-01-15 SPEC Specification 18 View
2002-01-15 CLM Claims 9 View
2002-01-15 ABST Abstract 1 View
2002-01-15 DRW Drawings-only black and white line drawings 4 View
2002-01-15 OATH Oath or Declaration filed 4 View
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Quick Facts
App. No.
10/047,343
Filed
2002-01-15
Granted
2003-11-11
Pub. No.
US20020096430A1
Art Unit
1753
PTA
-6 days