IP Library Patent Application 10052890
Patent Application Utility Small
App. No. 10/052,890 · Confirmation No. 9801

Process for tungsten silicide atomic layer deposition

Inventor: Ofer Sneh
Abandoned -- Failure to Respond to an Office Action View Publication ↗
⬇ PDF
Code Description Pages PDF
2004-05-05 ABN Abandonment 2 View
2003-09-25 CTNF Non-Final Rejection 7 View
2003-09-25 1449 List of References cited by applicant and considered by examiner 6 View
2003-09-25 892 List of references cited by examiner 1 View
2003-09-25 FWCLM Index of Claims 1 View
2003-09-25 SRFW Search information including classification, databases and other search related notes 1 View
2003-09-21 SRNT Examiner's search strategy and results 3 View
2003-05-19 A.PE Preliminary Amendment 1 View
2003-05-19 SPEC Specification 2 View
2003-05-19 LET. Miscellaneous Incoming Letter 1 View
2002-07-30 PA.. Power of Attorney 3 View
2002-05-29 LET. Miscellaneous Incoming Letter 6 View
2002-05-29 OATH Oath or Declaration filed 2 View
2002-04-08 IDS Information Disclosure Statement (IDS) Form (SB08) 9 View
2002-04-08 FOR Foreign Reference 17 View
2002-04-08 FOR Foreign Reference 19 View
2002-04-08 FOR Foreign Reference 25 View
2002-04-08 FOR Foreign Reference 46 View
2002-04-08 FOR Foreign Reference 6 View
2002-04-08 FOR Foreign Reference 6 View
2002-04-08 FOR Foreign Reference 5 View
2002-04-08 FOR Foreign Reference 3 View
2002-04-08 FOR Foreign Reference 3 View
2002-04-03 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2001-10-19 TRNA Transmittal of New Application 1 View
2001-10-19 SPEC Specification 12 View
2001-10-19 CLM Claims 6 View
2001-10-19 LET. Miscellaneous Incoming Letter 1 View
2001-10-19 ABST Abstract 1 View
2001-10-19 WFEE Fee Worksheet (SB06) 1 View
2001-10-19 WCLM Claims Worksheet (PTO-2022) 1 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
10/052,890
Filed
2001-10-19
Pub. No.
US20030190424A1
Art Unit
1762