Granted Patent
Utility
US 6,610,597
· Confirmation No. 8651
METHOD OF FABRICATING A SEMICONDUCTOR DEVICE
Inventor:
Migaku Kobayashi
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-06-24 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-03-25 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 5 | View | |
| 2003-03-17 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2003-03-17 | CLM |
Claims | 1 | View | |
| 2003-03-17 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2003-03-17 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-01-13 | CTFR |
Final Rejection | 5 | View | |
| 2003-01-13 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2003-01-13 | EXIN |
Examiner Interview Summary Record (PTOL - 413) | 2 | View | |
| 2002-10-28 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2002-10-28 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2002-10-28 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2002-10-21 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2002-10-15 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2002-10-15 | CLM |
Claims | 2 | View | |
| 2002-10-15 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2002-10-15 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2002-07-31 | CTNF |
Non-Final Rejection | 7 | View | |
| 2002-07-31 | 892 |
List of references cited by examiner | 1 | View | |
| 2002-07-31 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2002-07-19 | TRAN.LET |
Transmittal Letter | 3 | View | |
| 2002-07-19 | FOR |
Foreign Reference | 8 | View | |
| 2002-07-19 | FOR |
Foreign Reference | 13 | View | |
| 2002-06-18 | TRAN.LET |
Transmittal Letter | 4 | View | |
| 2002-06-18 | FOR |
Foreign Reference | 10 | View | |
| 2002-06-18 | FOR |
Foreign Reference | 3 | View | |
| 2002-06-18 | FOR |
Foreign Reference | 51 | View | |
| 2002-01-29 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-01-29 | A.PE |
Preliminary Amendment | 12 | View | |
| 2002-01-29 | SPEC |
Specification | 25 | View | |
| 2002-01-29 | CLM |
Claims | 5 | View | |
| 2002-01-29 | ABST |
Abstract | 1 | View | |
| 2002-01-29 | DRW |
Drawings-only black and white line drawings | 12 | View | |
| 2002-01-29 | OATH |
Oath or Declaration filed | 3 | View | |
| 2002-01-29 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-01-29 | DRW |
Drawings-only black and white line drawings | 12 | View | |
| 2002-01-29 | SPEC |
Specification | 25 | View | |
| 2002-01-29 | CLM |
Claims | 5 | View | |
| 2002-01-29 | ABST |
Abstract | 1 | View | |
| 2002-01-29 | OATH |
Oath or Declaration filed | 3 | View | |
| 2002-01-29 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2002-01-29 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-01-29 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-01-29 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2002-01-29 | A.PE |
Preliminary Amendment | 1 | View | |
| 2002-01-29 | SPEC |
Specification | 1 | View | |
| 2002-01-29 | CLM |
Claims | 4 | View | |
| 2002-01-29 | REM |
Applicant Arguments/Remarks Made in an Amendment | 6 | View | |
| 2002-01-29 | FOR |
Foreign Reference | 5 | View | |
| 2002-01-29 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2002-01-29 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2002-01-29 | FWCLM |
Index of Claims | 1 | View |
Inventors
Migaku Kobayashi
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/689
H10D64/011
C23C14/046
H10W20/033
H10P14/44
H10W20/054
H10W20/42
H10W20/056
H01J37/321
Prosecution
- Examiner
- GOUDREAU, GEORGE A
- Art Unit
- 1763
- Docket No.
- N230500C1
- Confirmation No.
- 8651
Foreign Priority
230500/1999
·
1999-08-17
·
JAPAN
Publication
- Pub. No.
- US20020081850A1
- Pub. Date
- 2002-06-27
Patent Term Adjustment
0days
CHANGE OF ADDRESS
Recorded 2017-11-29
from
NEC CORPORATION
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2006-12-27
from
NEC CORPORATION
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-02-13
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Quick Facts
- Patent No.
- US 6,610,597
- App. No.
- 10/060,569
- Filed
- 2002-01-29
- Granted
- 2003-08-26
- Pub. No.
- US20020081850A1
- Examiner
- GOUDREAU, GEORGE A
- Art Unit
- 1763
- PTA
- 0 days
External Links