IP Library › Granted Patent US 6,800,402
Granted Patent Utility
US 6,800,402 · Confirmation No. 9289

PHASE-SHIFTING MASK AND METHOD OF FORMING PATTERN USING THE SAME

Inventor: Masashi Fujimoto
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2004-08-31 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-06-02 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-06-02 NOA Notice of Allowance and Fees Due (PTOL-85) 1 View
2004-06-02 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-06-02 FWCLM Index of Claims 1 View
2004-06-02 SRFW Search information including classification, databases and other search related notes 1 View
2004-04-30 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-04-30 CLM Claims 6 View
2004-04-30 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2004-02-03 CTNF Non-Final Rejection 5 View
2004-02-03 1449 List of References cited by applicant and considered by examiner 1 View
2004-02-03 892 List of references cited by examiner 1 View
2004-02-03 FWCLM Index of Claims 1 View
2004-02-03 SRFW Search information including classification, databases and other search related notes 1 View
2003-12-05 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-12-05 CLM Claims 3 View
2003-12-05 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-11-05 CTRS Requirement for Restriction/Election 4 View
2003-11-05 FWCLM Index of Claims 1 View
2003-11-05 SRFW Search information including classification, databases and other search related notes 1 View
2002-02-04 TRNA Transmittal of New Application 2 View
2002-02-04 ADS Application Data Sheet 3 View
2002-02-04 A.PE Preliminary Amendment 12 View
2002-02-04 SPEC Specification 40 View
2002-02-04 CLM Claims 4 View
2002-02-04 ABST Abstract 1 View
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2002-02-04 OATH Oath or Declaration filed 2 View
2002-02-04 WFEE Fee Worksheet (SB06) 1 View
2002-02-04 WFEE Fee Worksheet (SB06) 1 View
2002-02-04 WCLM Claims Worksheet (PTO-2022) 1 View
2002-02-04 FRPR Certified Copy of Foreign Priority Application 57 View
2002-02-04 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2002-02-04 FOR Foreign Reference 4 View
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Quick Facts
Patent No.
US 6,800,402
App. No.
10/061,283
Filed
2002-02-04
Granted
2004-10-05
Pub. No.
US20020106567A1
Art Unit
1756
PTA
0 days