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App. No. 10/062,668 · Confirmation No. 6108

METHOD FOR POLISHING SEMICONDUCTOR DEVICE

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2002-02-05 TRNA Transmittal of New Application 2 View
2002-02-05 A.PE Preliminary Amendment 2 View
2002-02-05 SPEC Specification 11 View
2002-02-05 CLM Claims 5 View
2002-02-05 ABST Abstract 1 View
2002-02-05 DRW Drawings-only black and white line drawings 4 View
2002-02-05 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
10/062,668
Filed
2002-02-05
Granted
2002-12-03
Pub. No.
US20020086538A1
Art Unit
1765
PTA
-64 days