Patent Application
Utility
App. No. 10/103,689
· Confirmation No. 9729
METHOD FOR POLISHING SEMICONDUCTOR DEVICE
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2002-03-25 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-03-25 | A.PE |
Preliminary Amendment | 6 | View | |
| 2002-03-25 | SPEC |
Specification | 11 | View | |
| 2002-03-25 | CLM |
Claims | 3 | View | |
| 2002-03-25 | ABST |
Abstract | 1 | View | |
| 2002-03-25 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2002-03-25 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Hiroyuki Kojima
Kawasaki-shi, JAPAN
Hidemi Sato
Yokohama-shi, JAPAN
Tetsuo Ookawa
Yokohama-shi, JAPAN
Mariko Urushibara
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/691
H10P52/00
H10P95/062
H10P52/402
B24B37/042
B24B37/046
Prosecution
Foreign Priority
P08-306160
·
1996-11-18
·
JAPAN
Publication
- Pub. No.
- US20020098698A1
- Pub. Date
- 2002-07-25
Patent Term Adjustment
0days
Parent
is a Continuation of
→
App. 10/062,668
· US 6,489,243
Filed 2002-02-05
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent
is a Continuation of
→
App. 09/308,184
· US 6,420,265
Filed 1999-05-14
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent
PCT
is a National Stage Entry of
→
PCT/JP1997/004172
Filed 1997-11-17
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
from
HITACHI, LTD.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2011-03-25
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