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App. No. 10/062,716 · Confirmation No. 3108

METHOD FOR FORMING DUAL DAMASCENE LINE STRUCTURE

Inventor: Kil Ho Kim
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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Quick Facts
App. No.
10/062,716
Filed
2002-02-05
Granted
2004-06-01
Pub. No.
US20030003716A1
Art Unit
2822
PTA
-34 days