IP Library › Granted Patent US 6,772,084
Granted Patent Utility
US 6,772,084 · Confirmation No. 2744

OVERLAY MEASUREMENTS USING PERIODIC GRATINGS

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2009-06-03 C.AD Change of Address 2 View
2004-04-20 IFEE Issue Fee Payment (PTO-85B) 2 View
2004-04-01 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2004-04-01 1449 List of References cited by applicant and considered by examiner 2 View
2004-04-01 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-04-01 SRFW Search information including classification, databases and other search related notes 1 View
2004-03-30 SRNT Examiner's search strategy and results 9 View
2004-01-07 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2004-01-07 CLM Claims 21 View
2004-01-07 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2004-01-07 IDS Information Disclosure Statement (IDS) Form (SB08) 6 View
2004-01-07 FOR Foreign Reference 15 View
2004-01-07 FOR Foreign Reference 20 View
2004-01-07 FOR Foreign Reference 51 View
2004-01-07 FOR Foreign Reference 17 View
2004-01-07 FOR Foreign Reference 21 View
2004-01-07 FOR Foreign Reference 50 View
2004-01-07 FOR Foreign Reference 16 View
2003-10-08 CTNF Non-Final Rejection 6 View
2003-10-08 892 List of references cited by examiner 1 View
2003-08-07 PETDEC Petition Decision 2 View
2003-08-07 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2003-07-31 LET. Miscellaneous Incoming Letter 9 View
2003-05-02 PET. Petition Entered 2 View
2003-05-02 LET. Miscellaneous Incoming Letter 3 View
2003-01-31 LET. Miscellaneous Incoming Letter 3 View
2002-06-26 OATH Oath or Declaration filed 8 View
2002-06-26 XT/ Extension of Time 1 View
2002-06-26 LET. Miscellaneous Incoming Letter 3 View
2002-06-10 C.AD Change of Address 1 View
2002-03-28 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2002-01-31 TRNA Transmittal of New Application 2 View
2002-01-31 ADS Application Data Sheet 2 View
2002-01-31 SPEC Specification 25 View
2002-01-31 CLM Claims 20 View
2002-01-31 ABST Abstract 1 View
2002-01-31 DRW Drawings-only black and white line drawings 27 View
2002-01-31 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-01-31 SRFW Search information including classification, databases and other search related notes 1 View
2002-01-31 FWCLM Index of Claims 1 View
2002-01-31 TRNA Transmittal of New Application 2 View
2002-01-31 DRW Drawings-only black and white line drawings 28 View
2002-01-31 SPEC Specification 26 View
2002-01-31 CLM Claims 21 View
2002-01-31 ABST Abstract 1 View
2002-01-31 WFEE Fee Worksheet (SB06) 2 View
2002-01-31 WCLM Claims Worksheet (PTO-2022) 1 View
2002-01-31 ADS Application Data Sheet 2 View
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Quick Facts
Patent No.
US 6,772,084
App. No.
10/066,555
Filed
2002-01-31
Granted
2004-08-03
Pub. No.
US20030212525A1
Art Unit
2863
PTA
-20 days