IP Library Patent Application 10068213
Patent Application Utility
App. No. 10/068,213 · Confirmation No. 8141

POLISHING OF SEMICONDUCTOR SUBSTRATES

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
⬇ PDF
Code Description Pages PDF
2006-07-17 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2003-08-29 IFEE Issue Fee Payment (PTO-85B) 2 View
2002-02-06 TRNA Transmittal of New Application 1 View
2002-02-06 SPEC Specification 7 View
2002-02-06 CLM Claims 1 View
2002-02-06 ABST Abstract 1 View
2002-02-06 DRW Drawings-only black and white line drawings 2 View
2002-02-06 OATH Oath or Declaration filed 2 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
10/068,213
Filed
2002-02-06
Granted
2003-11-04
Pub. No.
US20020083650A1
Art Unit
1755
PTA
0 days