IP Library › Granted Patent US 6,733,929
Granted Patent Utility
US 6,733,929 · Confirmation No. 3666

PHASE SHIFT MASKING FOR COMPLEX PATTERNS WITH PROXIMITY ADJUSTMENTS

Inventor: Christophe Pierrat
Patented Case View Patent ↗ View Publication ↗
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2011-08-19 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2004-03-15 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-12-11 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-12-11 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-12-11 892 List of references cited by examiner 1 View
2003-12-11 1449 List of References cited by applicant and considered by examiner 12 View
2003-12-11 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-12-11 FWCLM Index of Claims 1 View
2003-12-11 SRFW Search information including classification, databases and other search related notes 1 View
2003-09-12 LET. Miscellaneous Incoming Letter 2 View
2003-01-23 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2002-09-23 IDS Information Disclosure Statement (IDS) Form (SB08) 13 View
2002-09-23 FOR Foreign Reference 113 View
2002-09-23 FOR Foreign Reference 24 View
2002-09-23 FOR Foreign Reference 6 View
2002-09-23 FOR Foreign Reference 43 View
2002-09-23 FOR Foreign Reference 48 View
2002-09-23 FOR Foreign Reference 51 View
2002-09-23 FOR Foreign Reference 5 View
2002-09-23 FOR Foreign Reference 6 View
2002-09-23 FOR Foreign Reference 99 View
2002-09-23 FOR Foreign Reference 31 View
2002-09-23 FOR Foreign Reference 27 View
2002-09-23 FOR Foreign Reference 10 View
2002-09-23 FOR Foreign Reference 14 View
2002-09-23 FOR Foreign Reference 4 View
2002-09-23 FOR Foreign Reference 28 View
2002-09-23 FOR Foreign Reference 8 View
2002-02-06 TRNA Transmittal of New Application 1 View
2002-02-06 SPEC Specification 38 View
2002-02-06 CLM Claims 10 View
2002-02-06 ABST Abstract 1 View
2002-02-06 DRW Drawings-only black and white line drawings 27 View
2002-02-06 OATH Oath or Declaration filed 7 View
2002-02-06 LET. Miscellaneous Incoming Letter 1 View
2002-02-06 ARTIFACT Artifact sheet indicating an item has been filed which cannot be scanned 1 View
2002-02-06 WFEE Fee Worksheet (SB06) 1 View
2002-02-06 WFEE Fee Worksheet (SB06) 1 View
2002-02-06 WCLM Claims Worksheet (PTO-2022) 1 View
2002-02-06 PET. Petition Entered 2 View
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Quick Facts
Patent No.
US 6,733,929
App. No.
10/068,513
Filed
2002-02-06
Granted
2004-05-11
Pub. No.
US20020127479A1
Art Unit
1756
PTA
-4 days