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App. No. 10/075,566 · Confirmation No. 1193

METHOD FOR CLEANING SEMICONDUCTOR WAFER AFTER CHEMICAL MECHANICAL POLISHING ON COPPER WIRING

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2004-05-13 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-02-26 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
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2004-02-26 1449 List of References cited by applicant and considered by examiner 1 View
2004-02-26 FWCLM Index of Claims 1 View
2004-02-26 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-02-26 SRFW Search information including classification, databases and other search related notes 1 View
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2004-02-05 OATH Oath or Declaration filed 4 View
2004-02-05 FOR Foreign Reference 23 View
2003-12-18 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-12-18 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-10-07 CTNF Non-Final Rejection 7 View
2003-10-07 892 List of references cited by examiner 1 View
2003-10-07 1449 List of References cited by applicant and considered by examiner 1 View
2003-09-11 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-09-11 CLM Claims 7 View
2003-09-11 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-08-08 CTRS Requirement for Restriction/Election 5 View
2002-11-18 C.AD Change of Address 1 View
2002-02-13 TRNA Transmittal of New Application 5 View
2002-02-13 A.PE Preliminary Amendment 10 View
2002-02-13 SPEC Specification 34 View
2002-02-13 CLM Claims 5 View
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2002-02-13 OATH Oath or Declaration filed 3 View
2002-02-13 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-02-13 SRFW Search information including classification, databases and other search related notes 1 View
2002-02-13 FWCLM Index of Claims 1 View
2002-02-13 TRNA Transmittal of New Application 5 View
2002-02-13 DRW Drawings-only black and white line drawings 7 View
2002-02-13 SPEC Specification 34 View
2002-02-13 CLM Claims 5 View
2002-02-13 ABST Abstract 1 View
2002-02-13 OATH Oath or Declaration filed 3 View
2002-02-13 TRNA Transmittal of New Application 1 View
2002-02-13 WFEE Fee Worksheet (SB06) 1 View
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2002-02-13 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2002-02-13 A.PE Preliminary Amendment 1 View
2002-02-13 SPEC Specification 1 View
2002-02-13 CLM Claims 6 View
2002-02-13 REM Applicant Arguments/Remarks Made in an Amendment 2 View
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Quick Facts
App. No.
10/075,566
Filed
2002-02-13
Granted
2004-07-27
Pub. No.
US20020144710A1
Art Unit
1746
PTA
0 days