IP Library › Granted Patent US 6,609,086
Granted Patent Utility
US 6,609,086 · Confirmation No. 1022

PROFILE REFINEMENT FOR INTEGRATED CIRCUIT METROLOGY

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 Code Description Pages PDF
2002-02-12 TRNA Transmittal of New Application 3 View
2002-02-12 ADS Application Data Sheet 2 View
2002-02-12 SPEC Specification 36 View
2002-02-12 CLM Claims 29 View
2002-02-12 ABST Abstract 1 View
2002-02-12 DRW Drawings-only black and white line drawings 16 View
2002-02-12 OATH Oath or Declaration filed 7 View
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Quick Facts
Patent No.
US 6,609,086
App. No.
10/075,904
Filed
2002-02-12
Granted
2003-08-19
Art Unit
2857
PTA
0 days