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App. No. 10/078,941 · Confirmation No. 7416

APPARATUS AND METHOD FOR QUALIFYING A CHEMICAL MECHANICAL PLANARIZATION PROCESS

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2003-12-05 IFEE Issue Fee Payment (PTO-85B) 2 View
2002-02-20 TRNA Transmittal of New Application 3 View
2002-02-20 A.PE Preliminary Amendment 7 View
2002-02-20 SPEC Specification 10 View
2002-02-20 CLM Claims 4 View
2002-02-20 ABST Abstract 1 View
2002-02-20 DRW Drawings-only black and white line drawings 5 View
2002-02-20 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
10/078,941
Filed
2002-02-20
Granted
2004-01-20
Pub. No.
US20020081951A1
Art Unit
3723
PTA
-8 days