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App. No. 10/079,517 · Confirmation No. 6429

METHOD OF FORMING NITRIDE CAPPED CU LINES WITH IMPROVED ADHESION AND REDUCED ELECTROMIGRATION ALONG THE CU/NITRIDE INTERFACE

Inventor: Minh Van Ngo
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗
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2004-04-23 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-01-23 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-01-23 NOA Notice of Allowance and Fees Due (PTOL-85) 1 View
2004-01-23 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-01-23 SRFW Search information including classification, databases and other search related notes 1 View
2003-12-30 LET. Miscellaneous Incoming Letter 2 View
2003-12-30 AF/D Affidavit-submitted prior to Mar 15, 2013 4 View
2003-11-07 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-11-07 CLM Claims 3 View
2003-11-07 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2003-09-03 CTNF Non-Final Rejection 5 View
2003-09-03 892 List of references cited by examiner 1 View
2003-06-09 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-06-09 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2003-06-09 LET. Miscellaneous Incoming Letter 1 View
2003-05-06 CTNF Non-Final Rejection 4 View
2003-05-06 892 List of references cited by examiner 1 View
2003-05-02 SRNT Examiner's search strategy and results 1 View
2002-06-03 DRW Drawings-only black and white line drawings 5 View
2002-06-03 LET. Miscellaneous Incoming Letter 2 View
2002-06-03 TRNA Transmittal of New Application 2 View
2002-06-03 DRW Drawings-only black and white line drawings 5 View
2002-04-02 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2002-02-22 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-02-22 SRFW Search information including classification, databases and other search related notes 1 View
2002-02-22 FWCLM Index of Claims 1 View
2002-02-22 TRNA Transmittal of New Application 3 View
2002-02-22 DRW Drawings-only black and white line drawings 5 View
2002-02-22 SPEC Specification 9 View
2002-02-22 CLM Claims 2 View
2002-02-22 ABST Abstract 1 View
2002-02-22 OATH Oath or Declaration filed 2 View
2002-02-22 WFEE Fee Worksheet (SB06) 1 View
2002-02-22 WFEE Fee Worksheet (SB06) 1 View
2002-02-22 WCLM Claims Worksheet (PTO-2022) 1 View
2002-02-22 TRNA Transmittal of New Application 3 View
2002-02-22 SPEC Specification 9 View
2002-02-22 CLM Claims 2 View
2002-02-22 ABST Abstract 1 View
2002-02-22 DRW Drawings-only black and white line drawings 5 View
2002-02-22 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
10/079,517
Filed
2002-02-22
Granted
2004-06-01
Art Unit
1742
PTA
0 days