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App. No. 10/080,468 · Confirmation No. 8384

HDP CVD process for void-free gap fill of a high aspect ratio trench

Inventor: Hua Ji
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2004-05-28 CTAV Advisory Action (PTOL-303) 3 View
2004-05-19 FWCLM Index of Claims 1 View
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2003-11-07 WFEE Fee Worksheet (SB06) 1 View
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2003-10-02 REM Applicant Arguments/Remarks Made in an Amendment 10 View
2003-10-02 LET. Miscellaneous Incoming Letter 1 View
2003-10-02 XT/ Extension of Time 1 View
2003-05-27 CTNF Non-Final Rejection 11 View
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2003-04-21 SPEC Specification 1 View
2003-04-21 CLM Claims 3 View
2003-04-21 REM Applicant Arguments/Remarks Made in an Amendment 11 View
2003-04-21 XT/ Extension of Time 1 View
2003-04-16 PA.. Power of Attorney 2 View
2003-04-16 OATH Oath or Declaration filed 3 View
2003-04-16 LET. Miscellaneous Incoming Letter 2 View
2003-04-09 CTAV Advisory Action (PTOL-303) 3 View
2003-02-07 SPEC Specification 10 View
2003-02-07 CLM Claims 6 View
2003-02-07 ABST Abstract 1 View
2003-02-07 DRW Drawings-only black and white line drawings 2 View
2003-02-07 LET. Miscellaneous Incoming Letter 1 View
2003-02-07 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-02-07 SPEC Specification 1 View
2003-02-07 CLM Claims 2 View
2003-02-07 REM Applicant Arguments/Remarks Made in an Amendment 10 View
2003-02-07 LET. Miscellaneous Incoming Letter 1 View
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2002-11-20 CTFR Final Rejection 11 View
2002-11-20 1449 List of References cited by applicant and considered by examiner 1 View
2002-11-07 LET. Miscellaneous Incoming Letter 2 View
2002-08-28 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2002-08-28 SPEC Specification 1 View
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2002-08-28 REM Applicant Arguments/Remarks Made in an Amendment 7 View
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2002-08-12 LET. Miscellaneous Incoming Letter 2 View
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2002-05-20 CTNF Non-Final Rejection 7 View
2002-05-20 892 List of references cited by examiner 1 View
2002-04-26 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2002-02-22 TRNA Transmittal of New Application 1 View
2002-02-22 SPEC Specification 12 View
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2002-02-22 DRW Drawings-only black and white line drawings 6 View
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2002-02-22 LET. Miscellaneous Incoming Letter 1 View
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2002-02-22 FWCLM Index of Claims 1 View
2002-02-22 SRFW Search information including classification, databases and other search related notes 1 View
2002-02-22 TRNA Transmittal of New Application 1 View
2002-02-22 DRW Drawings-only black and white line drawings 6 View
2002-02-22 SPEC Specification 12 View
2002-02-22 CLM Claims 4 View
2002-02-22 ABST Abstract 1 View
2002-02-22 OATH Oath or Declaration filed 2 View
2002-02-22 WFEE Fee Worksheet (SB06) 2 View
2002-02-22 WFEE Fee Worksheet (SB06) 1 View
2002-02-22 WCLM Claims Worksheet (PTO-2022) 1 View
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Quick Facts
App. No.
10/080,468
Filed
2002-02-22
Pub. No.
US20030162363A1
Examiner
MAI, ANH D
Art Unit
2814