Patent Application
Utility
Small
App. No. 10/081,610
· Confirmation No. 9561
Substrate positioning system
Abandoned -- Failure to Respond to an Office Action
View Publication ↗
Inventors
Attorneys & Agents of Record
Classification
USPC
250/442.11
H10P72/7618
H10P72/50
H01J37/3171
H01J2237/20
Prosecution
- Examiner
- BERMAN, JACK I
- Art Unit
- 2881
- Customer No.
- 30955
- Docket No.
- 399153
- Confirmation No.
- 9561
Publication
- Pub. No.
- US20020125446A1
- Pub. Date
- 2002-09-12
Parent
Claims priority from a provisional application
→
App. 60/270,644
Filed 2001-02-20
· Provisional Application Expired
Child
is a Continuation of
→
App. 10/153,114
· US 6,777,687
Filed 2002-05-21
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
is a Continuation of
→
App. 10/889,193
· US 6,921,907
Filed 2004-07-12
· Patented Case
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-05-21
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Quick Facts
- App. No.
- 10/081,610
- Filed
- 2002-02-20
- Pub. No.
- US20020125446A1
- Examiner
- BERMAN, JACK I
- Art Unit
- 2881
External Links