Patent Application
Provisional
App. No. 60/270,644
· Confirmation No. 8658
Robust mechanical scan robot for an ion implanter with a single rotary linkage
Provisional Application Expired
Inventors
Attorneys & Agents of Record
Prosecution
- Customer No.
- 30955
- Docket No.
- 391090
- Confirmation No.
- 8658
Child
Claims priority from a provisional application
→
App. 10/081,610
Filed 2002-02-20
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
→
App. 10/153,114
· US 6,777,687
Filed 2002-05-21
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
Claims priority from a provisional application
→
App. 10/889,193
· US 6,921,907
Filed 2004-07-12
· Patented Case
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 60/270,644
- Filed
- 2001-02-20
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