IP Library › Granted Patent US 6,465,325
Granted Patent Utility
US 6,465,325 · Confirmation No. 5015

PROCESS FOR DEPOSITING AND PLANARIZING BPSG FOR DENSE TRENCH MOSFET APPLICATION

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2013-02-27 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
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2002-02-26 TRNA Transmittal of New Application 9 View
2002-02-26 SPEC Specification 6 View
2002-02-26 CLM Claims 3 View
2002-02-26 ABST Abstract 1 View
2002-02-26 DRW Drawings-only black and white line drawings 2 View
2002-02-26 OATH Oath or Declaration filed 8 View
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Quick Facts
Patent No.
US 6,465,325
App. No.
10/082,944
Filed
2002-02-26
Granted
2002-10-15
Pub. No.
US20020119639A1
Art Unit
2813
PTA
-120 days