IP Library › Patent Application 60271832
Patent Application Provisional
App. No. 60/271,832 · Confirmation No. 5262

BPSG deposition and planarization for dense trench MOSFET applications

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2013-02-27 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2006-11-13 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2001-02-27 TRNA Transmittal of New Application 4 View
2001-02-27 SPEC Specification 4 View
2001-02-27 CLM Claims 1 View
2001-02-27 DRW Drawings-only black and white line drawings 4 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
60/271,832
Filed
2001-02-27