Granted Patent
Utility
US 6,723,213
· Confirmation No. 3362
TITANIUM TARGET ASSEMBLY FOR SPUTTERING AND METHOD FOR PREPARING THE SAME
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-03-03 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-12-05 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2002-02-27 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-02-27 | SPEC |
Specification | 15 | View | |
| 2002-02-27 | CLM |
Claims | 2 | View | |
| 2002-02-27 | ABST |
Abstract | 1 | View | |
| 2002-02-27 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2002-02-27 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Yasuo Nakadai
Chiba-ken, JAPAN
Poong Kim
Tokyo-to, JAPAN
Weiping Chai
Chiba-ken, JAPAN
Masahiro Kodera
Chiba-ken, JAPAN
Attorneys & Agents of Record
Classification
USPC
204/298.13
B23K35/007
B23K2103/14
B23K35/005
B23K35/3006
C23C14/3414
Prosecution
- Examiner
- VERSTEEG, STEVEN H
- Art Unit
- 1753
- Customer No.
- 4372
- Docket No.
- 024656-00010
- Confirmation No.
- 3362
Foreign Priority
056913/2001
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2001-03-01
·
JAPAN
Publication
- Pub. No.
- US20020121437A1
- Pub. Date
- 2002-09-05
Patent Term Adjustment
-151days
No related applications found.
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Quick Facts
- Patent No.
- US 6,723,213
- App. No.
- 10/083,123
- Filed
- 2002-02-27
- Granted
- 2004-04-20
- Pub. No.
- US20020121437A1
- Examiner
- VERSTEEG, STEVEN H
- Art Unit
- 1753
- PTA
- -151 days
External Links