Granted Patent
Utility
US 6,664,738
· Confirmation No. 6816
PLASMA PROCESSING APPARATUS
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-10-02 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2002-02-27 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-02-27 | SPEC |
Specification | 31 | View | |
| 2002-02-27 | CLM |
Claims | 4 | View | |
| 2002-02-27 | ABST |
Abstract | 1 | View | |
| 2002-02-27 | DRW |
Drawings-only black and white line drawings | 7 | View |
Inventors
Masatsugu Arai
Chiyoda, JAPAN
Ryujiro Udo
Ushiku, JAPAN
Naoyuki Tamura
Kudamatsu, JAPAN
Masanori Kadotani
Kudamatsu, JAPAN
Motohiko Yoshigai
Hikari, JAPAN
Attorneys & Agents of Record
Classification
USPC
315/111.21
H10P72/0434
H10P72/722
H01J37/32724
H01J2237/2001
Prosecution
- Examiner
- DINH, TRINH VO
- Art Unit
- 2821
- Customer No.
- 20457
- Docket No.
- 500.41301X00
- Confirmation No.
- 6816
Publication
- Pub. No.
- US20030160568A1
- Pub. Date
- 2003-08-28
Patent Term Adjustment
0days
CHANGE OF NAME AND ADDRESS
Recorded 2020-03-30
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-04-05
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Quick Facts
- Patent No.
- US 6,664,738
- App. No.
- 10/083,381
- Filed
- 2002-02-27
- Granted
- 2003-12-16
- Pub. No.
- US20030160568A1
- Examiner
- DINH, TRINH VO
- Art Unit
- 2821
- PTA
- 0 days
External Links