Patent Application
Utility
App. No. 10/083,710
· Confirmation No. 1547
METHOD OF CONTROLLING METAL ETCH PROCESSES, AND SYSTEM FOR ACCOMPLISHING SAME
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2011-03-04 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2002-02-26 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-02-26 | SPEC |
Specification | 21 | View | |
| 2002-02-26 | CLM |
Claims | 14 | View | |
| 2002-02-26 | ABST |
Abstract | 1 | View | |
| 2002-02-26 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2002-02-26 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
438/7
H10P72/0604
H10P74/277
G01N21/9501
G01N21/956
Prosecution
- Examiner
- HOANG, QUOC DINH
- Art Unit
- 2818
- Customer No.
- 10742
- Docket No.
- 2000.092900
- Confirmation No.
- 1547
Patent Term Adjustment
0days
RELEASE OF SECURITY INTEREST
Recorded 2021-05-12
AFFIRMATION OF PATENT ASSIGNMENT
Recorded 2009-08-18
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-02-26
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Quick Facts
- App. No.
- 10/083,710
- Filed
- 2002-02-26
- Granted
- 2003-05-13
- Examiner
- HOANG, QUOC DINH
- Art Unit
- 2818
- PTA
- 0 days
External Links