IP Library › Patent Application 10087498
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App. No. 10/087,498 · Confirmation No. 3034

Method of forming an opening by etching an organic layer in multiple etching steps at reduced pressures

Inventor: Hidetaka Nambu
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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 Code Description Pages PDF
2002-03-01 TRNA Transmittal of New Application 1 View
2002-03-01 SPEC Specification 10 View
2002-03-01 CLM Claims 5 View
2002-03-01 ABST Abstract 1 View
2002-03-01 DRW Drawings-only black and white line drawings 3 View
2002-03-01 OATH Oath or Declaration filed 1 View
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Quick Facts
App. No.
10/087,498
Filed
2002-03-01
Pub. No.
US20020164881A1
Art Unit
2813