Patent Application
Utility
App. No. 10/090,883
· Confirmation No. 6529
Shot configuration measuring mark and transfer error detection method using the same
Inventor:
Hirofumi Saito
Abandoned -- Failure to Respond to an Office Action
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2005-10-25 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-07-13 | ABN |
Abandonment | 2 | View | |
| 2002-03-05 | TRNA |
Transmittal of New Application | 6 | View | |
| 2002-03-05 | SPEC |
Specification | 18 | View | |
| 2002-03-05 | CLM |
Claims | 2 | View | |
| 2002-03-05 | ABST |
Abstract | 1 | View | |
| 2002-03-05 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2002-03-05 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Hirofumi Saito
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
257/797
H10P76/00
G03F7/70633
H10W46/501
H10W46/00
Prosecution
- Examiner
- ANDUJAR, LEONARDO
- Art Unit
- 2826
- Customer No.
- 23389
- Docket No.
- 15340
- Confirmation No.
- 6529
Foreign Priority
68293/2001
·
2001-03-12
·
JAPAN
Publication
- Pub. No.
- US20020127486A1
- Pub. Date
- 2002-09-12
No related applications found.
from
NEC CORPORATION
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-02-19
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Quick Facts
- App. No.
- 10/090,883
- Filed
- 2002-03-05
- Pub. No.
- US20020127486A1
- Examiner
- ANDUJAR, LEONARDO
- Art Unit
- 2826
External Links