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US 6,753,618 · Confirmation No. 3557

MIM CAPACITOR WITH METAL NITRIDE ELECTRODE MATERIALS AND METHOD OF FORMATION

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2002-03-11 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
Patent No.
US 6,753,618
App. No.
10/093,470
Filed
2002-03-11
Granted
2004-06-22
Pub. No.
US20030168750A1
Examiner
TRAN, LONG K
Art Unit
2818
PTA
-84 days