IP Library Granted Patent US 6,596,973
Granted Patent Utility
US 6,596,973 · Confirmation No. 6483

PYROMETER CALIBRATED WAFER TEMPERATURE ESTIMATOR

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Code Description Pages PDF
2007-06-11 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2002-03-07 TRNA Transmittal of New Application 3 View
2002-03-07 SPEC Specification 10 View
2002-03-07 CLM Claims 4 View
2002-03-07 ABST Abstract 1 View
2002-03-07 DRW Drawings-only black and white line drawings 6 View
2002-03-07 OATH Oath or Declaration filed 6 View
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Quick Facts
Patent No.
US 6,596,973
App. No.
10/096,138
Filed
2002-03-07
Granted
2003-07-22
Art Unit
3742
PTA
0 days