Granted Patent
Utility
US 6,514,130
· Confirmation No. 6924
METHOD AND APPARATUS FOR MECHANICAL AND CHEMICAL-MECHANICAL PLANARIZATION OF MICROELECTRONIC SUBSTRATES
Inventor:
Scott E. Moore
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2002-03-12 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-03-12 | ADS |
Application Data Sheet | 2 | View | |
| 2002-03-12 | A.PE |
Preliminary Amendment | 2 | View | |
| 2002-03-12 | SPEC |
Specification | 14 | View | |
| 2002-03-12 | CLM |
Claims | 17 | View | |
| 2002-03-12 | ABST |
Abstract | 1 | View | |
| 2002-03-12 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2002-03-12 | OATH |
Oath or Declaration filed | 5 | View |
Inventors
Scott E. Moore
Meridian, ID
Attorneys & Agents of Record
Classification
USPC
451/296
H10P52/00
B24B37/26
Prosecution
- Examiner
- NGUYEN, DUNG V
- Art Unit
- 3723
- Docket No.
- 500390.12
- Confirmation No.
- 6924
Publication
- Pub. No.
- US20020094765A1
- Pub. Date
- 2002-07-18
Patent Term Adjustment
-60days
Parent
is a Division of
→
App. 09/444,754
· US 6,354,930
Filed 1999-11-22
· Patented Case
Parent
is a Continuation of
→
App. 09/001,333
· US 6,139,402
Filed 1997-12-30
· Patented Case
Child
is a Continuation of
→
App. 10/345,116
Filed 2003-01-14
· Abandoned -- Incomplete Application (Pre-examination)
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-01-04
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Quick Facts
- Patent No.
- US 6,514,130
- App. No.
- 10/096,540
- Filed
- 2002-03-12
- Granted
- 2003-02-04
- Pub. No.
- US20020094765A1
- Examiner
- NGUYEN, DUNG V
- Art Unit
- 3723
- PTA
- -60 days
External Links