Semiconductor device and method for manufacturing semiconductor device
View Patent ↗A semiconductor device comprising a semiconductor substrate, a gate dielectrics formed on the semiconductor substrate and including a silicon oxide film containing a metallic element, the silicon oxide film containing the metallic element including a first region near a lower surface thereof, a second region near an upper surface thereof, and a third region between the first and second regions, the metallic element contained in the silicon oxide film having a density distribution in a thickness direction of the silicon oxide film, a peak of the density distribution existing in the third region, and an electrode formed on the gate dielectrics.
1. A method of manufacturing a semiconductor device, comprising: supplying, into a chamber in which a substrate is held, an organic compound containing silicon and an organic compound containing a metallic element selected from a group consisting of Zr, Hf, Al and La; and
forming a silicon oxide film containing the metallic element on the substrate by a thermal CVD method that does not use an active oxygen species.
2. The method according to claim 1 , further comprising supplying an O 2 gas into the chamber.
3. The method according to claim 1 , wherein the silicon oxide film containing the metallic element is a gate dielectric of a metal-oxide-semiconductor field effect transistor.
4. The method according to claim 1 , wherein the organic compound containing the metallic element further contains another metallic element selected from a group consisting of Zr, Hf, Al and La.
5. The method according to claim 1 , wherein an amount of the organic compound containing the metallic element and supplied to the chamber is not more than {fraction (1/10)} an amount of the organic compound containing silicon and supplied to the chamber.
6. The method according to claim 1 , wherein the following formula is satisfied:
0 <N M /( N M +N Si )<0.5
where the N M represents the number of atoms of the metallic element contained in the silicon oxide film, and the N Si represents the number of atoms of silicon contained in the silicon oxide film.
7. The method according to claim 1 , wherein the organic compound containing silicon is an alkoxide compound of silicon.
8. The method according to claim 7 , wherein the alkoxide compound of silicon is tetraethoxysilane.
9. The method according to claim 1 , wherein the organic compound containing the metallic element is an alkoxide compound of the metallic element.
10. The method according to claim 9 , wherein the alkoxide compound of the metallic element is a tertiarybuthoxy compound.