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App. No. 10/106,161 · Confirmation No. 5592

METHOD OF FORMING A TRENCH ISOLATION STRUCTURE AND SEMICONDUCTOR DEVICE

Inventor: Keita Kumamoto
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2009-01-07 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2008-11-24 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2002-03-26 TRNA Transmittal of New Application 1 View
2002-03-26 SPEC Specification 21 View
2002-03-26 CLM Claims 7 View
2002-03-26 ABST Abstract 1 View
2002-03-26 DRW Drawings-only black and white line drawings 10 View
2002-03-26 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
10/106,161
Filed
2002-03-26
Granted
2003-07-08
Pub. No.
US20020142564A1
Art Unit
2898
PTA
-5 days