Granted Patent
Utility
US 6,645,881
· Confirmation No. 7274
METHOD OF FORMING COATING FILM, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND COATING SOLUTION
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2017-09-28 | OATH |
Oath or Declaration filed | 4 | View | |
| 2003-09-04 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2002-04-02 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-04-02 | SPEC |
Specification | 52 | View | |
| 2002-04-02 | CLM |
Claims | 5 | View | |
| 2002-04-02 | ABST |
Abstract | 1 | View | |
| 2002-04-02 | DRW |
Drawings-only black and white line drawings | 2 | View |
Inventors
Nobuhide Yamada
Tokyo, JAPAN
Rempei Nakata
Kamakura-shi, JAPAN
Makoto Sugiura
Tsuchiura-shi, JAPAN
Mutsuhiko Yoshioka
Tsukuba-shi, JAPAN
Takahiro Kitano
Kumamoto-ken, JAPAN
Shinji Kobayashi
Kumamoto-ken, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/782
C23C18/1212
H10P14/6922
H10P14/6686
H10P14/683
H10P14/6342
B05D1/26
C09D183/04
C09D183/14
Prosecution
- Examiner
- GHYKA, ALEXANDER G
- Art Unit
- 2812
- Docket No.
- 04329.2803
- Confirmation No.
- 7274
Foreign Priority
2002-012053
·
2002-01-21
·
JAPAN
Publication
- Pub. No.
- US20030139063A1
- Pub. Date
- 2003-07-24
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2017-09-28
from
KITANO, TAKAHIRO,
KOBAYASHI, SHINJI,
NAKATA, REMPEI,
SUGIURA, MAKOTO,
YAMADA, NOBUHIDE,
YOSHIOKA, MUTSUHIKO
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-06-26
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Quick Facts
- Patent No.
- US 6,645,881
- App. No.
- 10/112,951
- Filed
- 2002-04-02
- Granted
- 2003-11-11
- Pub. No.
- US20030139063A1
- Examiner
- GHYKA, ALEXANDER G
- Art Unit
- 2812
- PTA
- 0 days
External Links