IP Library Granted Patent US 6,937,394
Granted Patent B2
US 6,937,394 · App. 10/117,942 · Granted Aug 30, 2005

Device and method for changing the stress-induced birefringence and/or the thickness of an optical component

View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 6,937,394
App. No.
10/117,942
Granted
Aug 30, 2005
Kind
B2
Abstract

A device serves the purpose of changing the stress-induced birefringence and/or the thickness (d and D, respectively) of an optical component by elastic deformation caused by means of stress. The optical component is gripped on a circumference, arranged at least approximately perpendicular to the optical axis, at least approximately entirely by at least one clamping element. The at least one clamping element can be actuated by at least one actuator. In the case of a method for this purpose, compressive stress is applied to the optical component, the elastic deformation being varied via a variation in the compressive stress.

Claims (11)

1. A method for uniformly changing the thickness of a rotationally symmetrical birefringent optical component by continuous inward radial compressive forces, comprising the step of applying uniform radially acting compressive clamping forces about substantially an entire circumference in a uniform continuous manner to the birefringent optical component by an annular pressure chamber which encloses the birefringent optical component on the outside, and varying the inward radial compressive forces.

2. The method as claimed in claim 1 , including producing pressure in the annular pressure chamber in by a pneumatic or hydraulic pressure source.

3. The method as claimed in claim 1 , including actively controlling the variation in the compressive clamping force.

4. A method for changing the stress-induced birefringence and the thickness of a rotationally symmetrical birefringent optical component by elastic deformation caused by means of stress, including the steps of applying radially acting compressive stresses to the birefringent optical component, and varying the elastic deformation by varying the compressive stress.

5. The method as claimed in claim 4 , wherein said radially acting compressive stresses are produced by an annular pressure chamber which encloses the birefringent optical component on the outside.

6. The method as claimed in claim 5 , wherein a pneumatic or hydraulic pressure source is used to produce pressure in the annular pressure chamber.

7. The method as claimed in claim 4 , wherein the step of varying the compressive stress is actively controlled.

8. An assembly for changing the thickness of a birefringent optical component comprising a birefringent optical component, a compressive clamp for gripping the birefringent optical component about a circumference so as to exert a compressive force on said birefringent optical component at least approximately perpendicular to the optical axis, said clamp comprising an annular pressure chamber surrounding the birefringent optical component and being compressed by at least one actuator to hold the birefringent optical component and cause elastic deformation of the birefringent optical component and thereby change the thickness of the birefringent optical component.

9. The assembly as claimed in claim 8 , wherein said annular pressure chamber is provided with a pressure connection which is connected to an external pressure source.

10. An assembly for changing the stress-induced birefringence and the thickness of a birefringent optical component by elastic deformation caused by means of stress, comprising a birefringent optical component, at least one compressive clamp wherein the birefringent optical component is gripped on a circumference, so as to exert a compressive force on said birefringent optical component at least approximately perpendicular to the optical axis, said at least one compressive clamp comprising an annular pressure chamber surrounding the birefringent optical component and being actuated by at least one actuator to thereby change the birefringence and the thickness of the birefringent optical component.

11. The assembly as claimed in claim 10 , wherein said annular pressure chamber is provided with a pressure connection which is connected to an external pressure source.

Assignments (1)
CHANGE OF NAME Recorded Jun 29, 2004
From: CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AKTIENGESELLSCHAFT
To: CARL ZEISS SMT AG
Reel/Frame 015530/0437 →