IP Library › Assignment 015530/0437
Patent Assignment
Reel/Frame 015530/0437

Change of Name

Recorded: 2004-06-29 Pages: 3
Assignor
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, D-73447, GERMANY
Covered Properties (23)
Optical System, in Particular Projection-Illumination Unit Used in Microlithography
Patent: 6,307,688 →
Application: 09/444,815 →
Apparatus for tilting an object about at least one axis, in particular an optical element
Patent: 6,271,976 →
Application: 09/490,890 →
Assembly Comprising an Optical Element and a Mount
Patent: 6,392,825 →
Application: 09/491,666 →
Adjustable Assembly
Patent: 6,259,571 →
Application: 09/503,023 →
Device for displacing an optical element along thr optical axis
Patent: 6,275,344 →
Application: 09/504,030 →
Projection Exposure System and an Exposure Method in Microlithography
Patent: 6,483,573 →
Application: 09/504,663 →
Method and device for mutually aligning a mask pattern formed in a mask and a substrate
Patent: 6,294,296 →
Application: 09/510,875 →
Objective, in Particular an Objective for a Semiconductor Lithography Projection Exposure Machine, and a Production Method
Patent: 6,417,974 →
Application: 09/564,444 →
Assembly comprising an optical element and a mount
Patent: 6,369,959 →
Application: 09/587,858 →
Device for Reducing the Peak Power of a Pulsed Laser Light Source
Patent: 6,996,141 →
Application: 09/588,261 →
Rotary Bearing
Patent: 6,457,866 →
Application: 09/669,501 →
Optical Imaging Device, in Particular Lens System, with at Least One System Diaphragm
Patent: 6,445,510 →
Application: 09/678,715 →
Method of Straightening the Supporting Surfaces of Supporting Elements for Optical Elements
Patent: 6,366,413 →
Application: 09/692,256 →
System for Compensating Directional and Positional Fluctuations in Light Produced by a Laser
Patent: 6,512,780 →
Application: 09/717,560 →
Device for the Low-Deformation Support of an Optical Element and Method for the Low-Deformation Support of the Optical Element
Patent: 6,441,975 →
Application: 09/722,603 →
Projection Lens, in Particular for Microlithography
Patent: 6,867,923 →
Application: 09/847,658 →
Publication: US 2002/0008861
Lens System, in Particular Projection Lens System in Semiconductor Lithography
Patent: 6,445,516 →
Application: 09/874,929 →
Publication: US 2002/0001142
Method for Heating a Workpiece
Patent: 6,621,048 →
Application: 09/946,801 →
Publication: US 2002/0030042
Method for the Interferometric Measurement of Non-Rotationally Symmetric Wavefront Errors
Patent: 6,839,143 →
Application: 10/045,260 →
Publication: US 2002/0063867
Device and Method for Changing the Stress-Induced Birefringence and/or the Thickness of an Optical Component
Patent: 6,937,394 →
Application: 10/117,942 →
Publication: US 2002/0149848
Catadioptric Objective
Patent: 6,836,379 →
Application: 10/117,943 →
Publication: US 2002/0196550
Catadioptric Objective
Patent: 6,842,294 →
Application: 10/118,479 →
Publication: US 2002/0181125
Optical System with Isolated Measuring Structure
Patent: 6,864,988 →
Application: 10/186,600 →
Publication: US 2003/0010902
Related Assignments (9)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest Aug 13, 2001
From: OSTERRIED, KARLFRID
To: STIFTUNG, CARL-ZEISS
Reel/Frame 012077/0106 →
Corrective Assignment to Correct the Fifth Assignor's First Name, Previously Recorded at Reel 011706 Frame 0551. Aug 15, 2001
From: EBERT, MICHAEL; SORG, FRANZ; TRUNZ, MICHAEL; MARIANEK, FRANK
To: CARL-ZEISS-STIFTUND TRADING AS CARL ZEISS
Reel/Frame 012087/0204 →
Record to Correct Assignee's Name on a Document Previously Recorded at Reel 011988, Frame 0460. Assignor Hereby Confirms the Assignment of the Entire Interest to Said Assignee. Oct 9, 2001
From: SCHUSTER, KARL-HEINZ; SINGER, WOLFGANG
To: CARL-ZEISS-STIFTUNG TRADING AS CARL ZEISS
Reel/Frame 012239/0726 →
Assignment of Assignor's Interest Nov 13, 2001
From: ULLMANN, JENS; KUSCHNEREIT, RALF
To: CARL-ZEISS-STIFTUNG TRADING AS CARL ZEISS
Reel/Frame 012304/0215 →
Re-Record to Correct the Name of the Assignee, Previously Recorded on Reel 012077 Frame 0106, Assignor Confirms the Assignment of the Entire Interest. Jan 14, 2002
From: OSTERRIED, KARL
To: CARL-ZEISS-STIFTUNG TRADING AS CARL ZEISS
Reel/Frame 012474/0166 →
Assignment of Assignor's Interest Jul 6, 2004
From: SINGER, WOLFGANG; SCHUSTER, KARL-HEINZ
To: CARL ZEISS SMT AG
Reel/Frame 015539/0278 →
Assignment of Assignor's Interest Nov 22, 2004
From: OTTO, WOLFGANG
To: CARL ZEISS SMT AG
Reel/Frame 016005/0938 →
Assignment of Assignor's Interest Dec 13, 2004
From: CARL-ZEISS-STIFTUNG
To: CARL ZEISS SMT AG
Reel/Frame 016059/0726 →
A Modifying Conversion Jan 18, 2011
From: CARL ZEISS SMT AG
To: CARL ZEISS SMT GMBH
Reel/Frame 025763/0367 →