Patent Assignment
Reel/Frame 016059/0726
Assignment of Assignor's Interest
Recorded: 2004-12-13
Pages: 5
Assignor
CARL-ZEISS-STIFTUNG
Executed: 2004-06-30
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, 73447, GERMAN DEMOCRATIC REPUBLIC
Covered Properties
(19)
Image Pickup Apparatus Having Electronic Zoom Based on Optical Zooming Focal Length Variation with Time
Optical System, in Particular Projection-Illumination Unit Used in Microlithography
Patent:
6,307,688 →
Application:
09/444,815 →
Apparatus for tilting an object about at least one axis, in particular an optical element
Patent:
6,271,976 →
Application:
09/490,890 →
Assembly Comprising an Optical Element and a Mount
Patent:
6,392,825 →
Application:
09/491,666 →
Adjustable Assembly
Patent:
6,259,571 →
Application:
09/503,023 →
Device for displacing an optical element along thr optical axis
Patent:
6,275,344 →
Application:
09/504,030 →
Projection Exposure System and an Exposure Method in Microlithography
Patent:
6,483,573 →
Application:
09/504,663 →
Method and device for mutually aligning a mask pattern formed in a mask and a substrate
Patent:
6,294,296 →
Application:
09/510,875 →
Objective, in Particular an Objective for a Semiconductor Lithography Projection Exposure Machine, and a Production Method
Patent:
6,417,974 →
Application:
09/564,444 →
Assembly comprising an optical element and a mount
Patent:
6,369,959 →
Application:
09/587,858 →
Device for Reducing the Peak Power of a Pulsed Laser Light Source
Patent:
6,996,141 →
Application:
09/588,261 →
Rotary Bearing
Patent:
6,457,866 →
Application:
09/669,501 →
Optical Imaging Device, in Particular Lens System, with at Least One System Diaphragm
Patent:
6,445,510 →
Application:
09/678,715 →
Method of Straightening the Supporting Surfaces of Supporting Elements for Optical Elements
Patent:
6,366,413 →
Application:
09/692,256 →
System for Compensating Directional and Positional Fluctuations in Light Produced by a Laser
Patent:
6,512,780 →
Application:
09/717,560 →
Device for the Low-Deformation Support of an Optical Element and Method for the Low-Deformation Support of the Optical Element
Patent:
6,441,975 →
Application:
09/722,603 →
Projection Lens, in Particular for Microlithography
Method for Heating a Workpiece
Method for the Interferometric Measurement of Non-Rotationally Symmetric Wavefront Errors
Related Assignments
(8)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Sep 9, 1996
From: KYUMA, KENJI; OHKAWARA, HIROTO
To: CANON KABUSHIKI KAISHA
Reel/Frame 008124/0506 →
Corrective Assignment to Correct the Fifth Assignor's First Name, Previously Recorded at Reel 011706 Frame 0551.
Aug 15, 2001
From: EBERT, MICHAEL; SORG, FRANZ; TRUNZ, MICHAEL; MARIANEK, FRANK
To: CARL-ZEISS-STIFTUND TRADING AS CARL ZEISS
Reel/Frame 012087/0204 →
Record to Correct Assignee's Name on a Document Previously Recorded at Reel 011988, Frame 0460. Assignor Hereby Confirms the Assignment of the Entire Interest to Said Assignee.
Oct 9, 2001
From: SCHUSTER, KARL-HEINZ; SINGER, WOLFGANG
To: CARL-ZEISS-STIFTUNG TRADING AS CARL ZEISS
Reel/Frame 012239/0726 →
Assignment of Assignor's Interest
Nov 13, 2001
From: ULLMANN, JENS; KUSCHNEREIT, RALF
To: CARL-ZEISS-STIFTUNG TRADING AS CARL ZEISS
Reel/Frame 012304/0215 →
Change of Name
Jun 29, 2004
From: CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AKTIENGESELLSCHAFT
To: CARL ZEISS SMT AG
Reel/Frame 015530/0437 →
Assignment of Assignor's Interest
Jul 6, 2004
From: SINGER, WOLFGANG; SCHUSTER, KARL-HEINZ
To: CARL ZEISS SMT AG
Reel/Frame 015539/0278 →
Assignment of Assignor's Interest
Nov 22, 2004
From: OTTO, WOLFGANG
To: CARL ZEISS SMT AG
Reel/Frame 016005/0938 →
A Modifying Conversion
Jan 18, 2011
From: CARL ZEISS SMT AG
To: CARL ZEISS SMT GMBH
Reel/Frame 025763/0367 →