Granted Patent
Utility
US 6,441,975 · App. 09/722,603
Device for the low-deformation support of an optical element and method for the low-deformation support of the optical element
Inventors:
Michael J. Ebert, Franz Sorg, Michael Trunz, Frank Marianek, Karlfried Osterried, Markus Kasparek
Patented Case
View Patent ↗
Granted: Aug 27, 2002
Filed: Nov 27, 2000
Inventors
Michael J. Ebert
Franz Sorg
Michael Trunz
Frank Marianek
Karlfried Osterried
Markus Kasparek
Assignee (at issue)
Carl Zeiss Stiftung
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.