Patent Assignment
Reel/Frame 016005/0938
Assignment of Assignor's Interest
Recorded: 2004-11-22
Pages: 2
Assignor
OTTO, WOLFGANG
Executed: 2004-10-20
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Method for the Interferometric Measurement of Non-Rotationally Symmetric Wavefront Errors
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.