IP Library › Granted Patent US 6,821,409
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US 6,821,409 · Confirmation No. 5058

ELECTROETCHING METHODS AND SYSTEMS USING CHEMICAL AND MECHANICAL INFLUENCE

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2002-04-05 FWCLM Index of Claims 1 View
2002-04-05 TRNA Transmittal of New Application 2 View
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2002-04-05 SPEC Specification 13 View
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Quick Facts
Patent No.
US 6,821,409
App. No.
10/117,991
Filed
2002-04-05
Granted
2004-11-23
Pub. No.
US20030178319A1
Art Unit
1775
PTA
-461 days