Re-assembly process for MEMS structures
View Patent ↗Methods of fabricating an array of aligned microstructures on a substrate are disclosed. The microstructures may be spring contacts or other microelements. The methods disclosed include construction of an alignment substrate, alignment of die elements with the alignment substrate, and fixation of the aligned die elements to a backing substrate.
1. A method for constructing an array of microstructures comprising:
providing a substrate having a plurality of substrate guide marks and a plurality of microstructures;
separating said substrate into a plurality of dies each having microstructures and at least one of said substrate guide marks;
providing a master substrate having a plurality of master guide marks;
aligning alignment members with master guide marks and corresponding substrate guide marks to provide an array of dies at predetermined locations;
fixing a structural backing to said array of dies to hold said array in position at said predetermined locations; and
removing said master substrate from said array of dies after said fixing the structural backing to said array of dies.
2. The method of claim 1 wherein said backing substrate includes contact terminals in electrical contact with at least one of said dies.
3. The method of claim 1 wherein said microstructures comprise microelectromechanical systems (MEMS) structures.
4. The method of claim 3 wherein said microstructures comprise spring contacts.
5. The method of claim 1 further comprising inspecting said dies and discarding defective dies.
6. The method of claim 1 further comprising electrically testing said dies and discarding defective dies.
7. The method of claim 1 wherein said microstructures comprise microelectromechanical systems (MEMS) structures.
8. The method of claim 1 where in said microstructures comprise spring contacts.
9. The method of claim 1 wherein said microstructures are tips, said method further comprising:
attaching said tips to probe elements, and
releasing said tips from said substrate.
10. The method of claim 1 wherein said substrate guide marks comprise indentations in said substrate adapted to receive generally frusto-spherical portions of an alignment member.
11. The method of claim 1 wherein said alignment members comprise spherically shaped elements.
12. The method of claim 1 wherein said master substrate comprises a plurality of dies fixed to a structural backing.
13. The method of claim 1 further comprising providing at least one electronic circuit element on said substrate.
14. The method of claim 13 , wherein said at least one electronic circuit element is one of a transistor, diode, resistor, or capacitor.
15. The method of claim 13 further comprising providing a plurality of said circuit elements, wherein at least one of said electronic circuit elements is integrated into said substrate.
16. The method of claim 1 , wherein said step of providing a substrate comprises forming said substrate guide marks through a patterned masking material.
17. The method of claim 16 , wherein said step of providing a substrate further comprises patterning said masking material to define locations of said guide marks on said substrate.
18. The method of claim 1 , wherein said step of providing a substrate comprises etching said guide marks into said substrate.
19. The method of claim 1 further comprising, after said aligning step, attaching ones of said plurality of microstructures to other structures.
20. The method of claim 19 , further comprising, after said attaching step, releasing said microstructures from said substrate.
21. The method of claim 20 , wherein said other structures are probes and said microstructures are probe tips.
22. The method of claim 1 , wherein said guide marks comprise structural irregularities in said substrate.
23. The method of claim 22 , wherein said master guide marks comprise structural irregularities in said master substrate.
24. The method of claim 23 , wherein each of said alignment members mates with one of said guide marks of said substrate and one of said master guide marks of said master substrate.
25. The method of claim 1 , wherein said guide marks comprise indentations in said substrate.
26. The method of claim 25 , wherein said master guide marks comprise indentations in said master substrate.
27. The method of claim 26 , wherein each of said alignment members mates with one of said indentations in said substrate and one of said indentations in said master substrate.
28. A method for constructing an array of microstructures comprising:
providing a substrate having a plurality of substrate guide marks and a plurality of microstructures;
separating said substrate into a plurality of dies each having microstructures and at least one of said substrate guide marks;
providing a master substrate having a plurality of master guide marks;
aligning alignment members with master guide marks and corresponding substrate guide marks to provide an array of dies at predetermined locations;
fixing a structural backing to said array of dies to hold said array of dies in position at said predetermined locations
wherein:
said microstructures comprise microelectromechanical systems (MEMS) structures,
said microstructures comprise spring contacts, and
said substrate guide marks comprise indentations in said substrate adapted to receive generally frusto-spherical portions of an alignment member.
29. The method of claim 28 wherein said alignment members comprise discreet spherically shaped elements.