Granted Patent
Utility
US 6,749,489
· Confirmation No. 2697
METHOD AND APPARATUS FOR PLANARIZING AND CLEANING MICROELECTRONIC SUBSTRATES
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-05-03 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2002-04-11 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-04-11 | ADS |
Application Data Sheet | 2 | View | |
| 2002-04-11 | A.PE |
Preliminary Amendment | 2 | View | |
| 2002-04-11 | SPEC |
Specification | 13 | View | |
| 2002-04-11 | CLM |
Claims | 16 | View | |
| 2002-04-11 | ABST |
Abstract | 1 | View | |
| 2002-04-11 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2002-04-11 | OATH |
Oath or Declaration filed | 11 | View | |
| 2002-04-11 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-04-11 | ADS |
Application Data Sheet | 2 | View | |
| 2002-04-11 | A.PE |
Preliminary Amendment | 2 | View | |
| 2002-04-11 | SPEC |
Specification | 13 | View | |
| 2002-04-11 | CLM |
Claims | 16 | View | |
| 2002-04-11 | ABST |
Abstract | 1 | View | |
| 2002-04-11 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2002-04-11 | OATH |
Oath or Declaration filed | 11 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
451/66
B24B37/24
B24B21/04
B24D3/28
Prosecution
- Examiner
- NGUYEN, GEORGE BINH MINH
- Art Unit
- 3723
- Docket No.
- 500404.06
- Confirmation No.
- 2697
Publication
- Pub. No.
- US20020173245A1
- Pub. Date
- 2002-11-21
Patent Term Adjustment
0days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-01-04
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Quick Facts
- Patent No.
- US 6,749,489
- App. No.
- 10/121,825
- Filed
- 2002-04-11
- Granted
- 2004-06-15
- Pub. No.
- US20020173245A1
- Examiner
- NGUYEN, GEORGE BINH MINH
- Art Unit
- 3723
- PTA
- 0 days
External Links